除了C面(0001)、A面(11-20)、M面(10-10)、R面(1-102)、N面(11-23)、V面(22-43)蓝宝石晶片外,晶芯光电还可以提供其他指定的晶向,例如:10-14晶向蓝宝石晶片和许多其他晶向晶片。所有的晶片都具有优良的材料性能。
抛光或未抛光表面,有或没有定位边,我们可以依据您的使用需要定制生产,以满足您在研究领域上的各种需求。
Item | 2-inch (10-14) 430μm Sapphire Wafers | |
Crystal Materials | 99,999%, High Purity, Monocrystalline Al2O3 | |
Grade | Prime, Epi-Ready | |
Surface Orientation | (10-14) | |
Diameter | 50.8 mm +/- 0.1 mm | |
Thickness | 430 μm +/- 25 μm | |
Single Side Polished | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
(SSP) | Back Surface | Fine ground, Ra = 0.8 μm to 1.2 μm |
Double Side Polished | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
(DSP) | Back Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
TTV | < 10 μm | |
BOW | < 10 μm | |
WARP | < 10 μm | |
Cleaning / Packaging | Class 100 cleanroom cleaning and vacuum packaging, | |
25 pieces in one cassette packaging or single piece packaging. |
注:可依据客户需求定制生产任意晶向、厚度的蓝宝石晶片。