A面(11-20)蓝宝石晶片具有均匀的介电常数和高绝缘特性,因此通常用于混合微电子应用,A-plane也可用于高超导体的生长。
例如:TlBaCaCuO(TbBaCaCuO)、Tl-2212,在蓝宝石氧化铈(CeO2)复合衬底上生长异质外延超导薄膜等。
| Item | 2-inch A-plane(11-20) 430μm Sapphire Wafers | |
| Crystal Materials | 99,999%, High Purity, Monocrystalline Al2O3 | |
| Grade | Prime, Epi-Ready | |
| Surface Orientation | A-plane(11-20) | |
| Diameter | 50.8 mm +/- 0.1 mm | |
| Thickness | 430 μm +/- 25 μm | |
| Primary Flat Orientation | C-plane(0001) +/- 0.2° | |
| Primary Flat Length | 16.0 mm +/- 1.0 mm | |
| Single Side Polished | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
| (SSP) | Back Surface | Fine ground, Ra = 0.8 μm to 1.2 μm |
| Double Side Polished | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
| (DSP) | Back Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
| TTV | < 10 μm | |
| BOW | < 10 μm | |
| WARP | < 10 μm | |
| Cleaning / Packaging | Class 100 cleanroom cleaning and vacuum packaging, | |
| 25 pieces in one cassette packaging or single piece packaging. | ||
注:可依据客户需求定制的生产任意晶向、厚度的蓝宝石晶片。
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