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R面(1-102)蓝宝石晶片

R面(1-102)蓝宝石晶片

R面(1-102)蓝宝石晶片是用于微电子IC应用中硅的异质外延沉积的优选材料。R面是蓝宝石的非极性面。因此,R面在蓝宝石器件中的位置不同,蓝宝石器件的力学、热学、电学和光学性能都会发生很大的变化,这也会影响蓝宝石器件的后续加工性能、加工效率和加工成品率。

为了使蓝宝石晶棒和后续蓝宝石产品的晶体结构一致,更常用的方法是在蓝宝石晶棒上加工一个A方向的表面作为蓝宝石晶片(后续蓝宝石产品)的平面取向,使蓝宝石晶棒和晶片的R方向位置一致。

R面(1-102)蓝宝石晶片 R-Plane (1-102) Sapphire Wafers
Specifications of R面(1-102)蓝宝石晶片
Item2 -inch R-plane(1-102) 430μm Sapphire Wafers
Crystal Materials99,999%, High Purity, Monocrystalline Al2O3
GradePrime, Epi-Ready
Surface OrientationR-plane(1-102)
Diameter50.8 mm +/- 0.1 mm
Thickness430 μm +/- 25 μm
Primary Flat Orientation45 +/- 1deg. counter-clockwise from C-axis projection on R-plane
Primary Flat Length16.0 mm +/- 1.0 mm
Single Side PolishedFront SurfaceEpi-polished, Ra < 0.5 nm (by AFM)
(SSP)Back SurfaceFine ground, Ra = 0.8 μm to 1.2 μm
Double Side PolishedFront SurfaceEpi-polished, Ra < 0.5 nm (by AFM)
(DSP)Back SurfaceEpi-polished, Ra < 0.5 nm (by AFM)
TTV< 10 μm
BOW< 10 μm
WARP< 10 μm
Cleaning / PackagingClass 100 cleanroom cleaning and vacuum packaging,
25 pieces in one cassette packaging or single piece packaging.

注:可提供任意晶向和厚度的定制化蓝宝石晶片。

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