4英寸C面（0001）蓝宝石晶片

蓝宝石晶片被广泛用作III-V族氮化物和许多其它外延薄膜的衬底。我们提供99.999%的高纯度蓝宝石晶片，具有优良的表面光洁度和平整度，以满足您的高标准使用需求。

Specifications of 4英寸C面（0001）蓝宝石晶片

Item	4-inch C-plane(0001) 650μm Sapphire Wafers
Crystal Materials	99,999%, High Purity, Monocrystalline Al2O3
Grade	Prime, Epi-Ready
Surface Orientation	C-plane(0001)
	C-plane off-angle toward M-axis 0.2 +/- 0.1°
Diameter	100.0 mm +/- 0.1 mm
Thickness	650 μm +/- 25 μm
Primary Flat Orientation	A-plane(11-20) +/- 0.2°
Primary Flat Length	30.0 mm +/- 1.0 mm
Single Side Polished	Front Surface	Epi-polished, Ra < 0.2 nm (by AFM)
(SSP)	Back Surface	Fine ground, Ra = 0.8 μm to 1.2 μm
Double Side Polished	Front Surface	Epi-polished, Ra < 0.2 nm (by AFM)
(DSP)	Back Surface	Epi-polished, Ra < 0.2 nm (by AFM)
TTV	< 20 μm
BOW	< 20 μm
WARP	< 20 μm
Cleaning / Packaging	Class 100 cleanroom cleaning and vacuum packaging,
	25 pieces in one cassette packaging or single piece packaging.

注：可依据客户需求定制生产任意晶向、厚度的蓝宝石晶片。

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