4英寸图案化蓝宝石基板

Name: 4英寸图案化蓝宝石基板
Brand: CRYSCORE OPTOELECTRONIC LIMITED

图案化蓝宝石基板（PSS）是一种用于GaN基发光二极管（led）的微图案化蓝宝石基板。小结构PSS大大提高了成品器件的光提取效率，PSS还解决了晶体位错和折射率失配等关键问题。

在工业上，制造PSS有两种不同的制造工艺，即干等离子体蚀刻和湿化学蚀刻。目前，大多数PSS产品都是采用干等离子体刻蚀的方法生产的，这是由于能其对精度和均匀性的做到有效控制。

Specifications of 4英寸图案化蓝宝石基板

Item	4-inch C-plane(0001) 650μm Pattern Sapphire Substrate
Crystal Materials	99,999%, High Purity, Monocrystalline Al2O3
Grade	Prime, Epi-Ready
Surface Orientation	C-plane(0001)
Diameter	100.0 mm +/- 0.1 mm
Thickness	650 μm +/- 25 μm
Primary Flat Orientation	A-plane(11-20) +/- 0.2°
Primary Flat Length	30.0 mm +/- 1.0 mm
Pattern Specification	Diameter: 2.7 +/- 0.1 μm; Spacing: 0.3 +/- 0.1 μm; Depth: 1.7 +/- 0.15 μm
Front Surface	Epitaxial ready
Back Surface	Fine ground, Ra = 0.8 μm to 1.2 μm
Laser Marking	Front side or Back side
TTV	< 20 μm
BOW	< 20 μm
WARP	< 20 μm
Cleaning / Packaging	Class 100 cleanroom cleaning and vacuum packaging,
Cleaning / Packaging	25 pieces in one cassette packaging or single piece packaging.

蓝宝石产品-询价

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