由于蓝宝石在日盲紫外探测中的应用前景，宽禁带MgZnO合金半导体薄膜越来越受到人们的关注。采用低压金属有机化学气相沉积（LP-MOCVD）方法在M面（10-10）蓝宝石晶片上制备了一系列不同成分的MgxZn1-xO薄膜。
晶芯光电可提供具有优异表面质量的M面（10-10）蓝宝石晶片，表面抛光粗糙度可控制小于0.5nm。
无论您是寻找双面还是单面抛光蓝宝石晶片，请联系我们，我们会为您的业务推荐最合适的；
Item | 2-inch M-plane(10-10) 430μm Sapphire Wafers | |
Crystal Materials | 99,999%, High Purity, Monocrystalline Al2O3 | |
Grade | Prime, Epi-Ready | |
Surface Orientation | M-plane(10-10) | |
Diameter | 50.8 mm +/- 0.1 mm | |
Thickness | 430 μm +/- 25 μm | |
Primary Flat Orientation | C-plane(0001) +/- 0.2° | |
Primary Flat Length | 16.0 mm +/- 1.0 mm | |
Single Side Polished (SSP) | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
Back Surface | Fine ground, Ra = 0.8 μm to 1.2 μm | |
Double Side Polished (DSP) | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
Back Surface | Epi-polished, Ra < 0.5 nm (by AFM) | |
TTV | < 10 μm | |
BOW | < 10 μm | |
WARP | < 10 μm | |
Cleaning / Packaging | Class 100 cleanroom cleaning and vacuum packaging, 25 pieces in one cassette packaging or single piece packaging. | |
注：可提供任意晶向和厚度的定制化蓝宝石晶片。
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